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Almaz Optics, Inc.
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SAPPHIRE, Al2O3Single crystal sapphire possesses a unique combination of excellent optical,
physical and chemical properties. The hardest of the oxide crystals, sapphire
retains its high strength at high temperatures, has good thermal properties and
excellent transparency. It is chemically resistant to common acids and alkali at
temperatures up to 1000 °C as well as to HF below 300 °C. These properties
encourage its wide use in hostile environments where optical transmission in the
range from the vacuum ultraviolet to the near infrared is required. Sapphire is
anisotropic hexagonal crystal. Its properties depend on crystallographic
direction (relative to the optical C-axis).
Main Properties
Transmission (through 2 mm thick sample)
Refractive Index
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Strain Gage Applications |
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| Substrate Diameter, mm | 50.8 (+/-0.1), 76 (+/-0.5), 100 (+/-0.5) |
| Substrate Orientation | (1012) R (+/-0.5º) |
| Substrate Thickness, µ | 330-430, 450, 460 (+/-25) |
| Silicon Layer Orientation | (100) |
| Silicon Layer Thickness, µ | 0.5-5.0 (+/-8%) |
| Silicon Conductivity Type (dopant) | p (Boron) |
| Silicon Resistivity, Ohm/sq | 10-30 (+/-8%) |
| Back side finish | Ground |
CMOS, MEMS Applications |
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| Substrate Diameter, mm | 50.8 (+/-0.1), 76 (+/-0.5), 100 (+/-0.5) |
| Substrate Orientation | (1012) R (+/-0.5º) |
| Substrate Thickness, µ | 330-430, 450, 460 (+/-25) |
| Silicon Layer Orientation | (100) |
| Silicon Layer Thickness, µ | 0.1-1.0 (+/-8%) |
| Silicon Conductivity Type (dopant) | n (Phosphorous) p (Boron) i (undoped) |
| Silicon Resistivity, Ohm*cm | 0.003-100 |
| Back side finish | Ground |
Other thickness and laser marking available on request
Substrates are available in all orientations including R-axis, C-axis, A-axis and M-axis, in a circular shape from 50.8 to 152 mm diameter. Thickness available in 0.33 - 1.0 mm range. Primary flats per SEMI Standard are provided on circular substrates, secondary flats and custom surface finish are available on request.
| Tolerances | Diameter: +/- 0.05 mm Thickness: +/- 0.05 mm Orientation: +/-1º (+/-0.1º on request) |
| Front Surface | Epi polished |
| Back Side | Lapped or polished |
| Flatness | < 2.5 microns per inch |
| Surface Roughness (Ra) | < 0.2 nm |
| Diameter | 50.8 +/-0.05, mm | 76.2 +/-0.05, mm | 101.6 +/-0.05, mm |
| Thickness | 330, 430 +/-25 µ | 380, 430, 480 +/-25 µ | 430, 500, 725 +/-25 µ |
| Orientation | C (0001) +/-0.1º | C (0001) +/-0.1º | C (0001) +/-0.1º |
| TTV | < 10 µ | < 10 µ | < 20 µ |
| Bow | < 5 µ | < 10 µ | < 10 µ |
| Front Surface |
Epi polished |
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| Back Side |
Lapped or optically polished |
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| Flatness | < 5 µ | < 7 µ | < 8 µ |
| Roughness (Ra) | < 0.2 nm | < 0.2 nm | < 0.2 nm |
| Primary Flat Length | 16.0 +/-0.8 mm | 22.0 +/-0.8 mm | 32.5 +/-0.8 mm |
| Primary Flat Location | A or M axis +/- 0.3º | A or M axis +/- 0.3º | A or M axis +/- 0.5º |
| Secondary Flat Location | 90º counterclockwise to primary flat | ||
| Package |
Single wafer pack or 25 wafers cassette |
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